J. Micro/Nanolith. MEMS MOEMS 6!2", 023005 !Apr–Jun 2007" Plasma cleaning of lithium off of collector optics material for use in extreme ultraviolet lithography applications Martin J. Neumann

Source URL: cpmi.illinois.edu

Plasma-assisted cleaning by metastable-atom neutralization Wayne M. Lytle, Daniel Andruczyk, and David N. Ruzic Citation: Journal of Vacuum Science & Technology B 31, ); doi: View online: ht

Source URL: cpmi.illinois.edu

T N O Int e r n ation a l C e nt r e f o r C onta m in ation C ont r o l X nm Node Backside substrate cleaning test bench.

Source URL: www.tno.nl

• Health
• Cleaning
• Contamination control
• Safety
• Security
• Wafer
• Ultraviolet
• Plasma cleaning
• Cleanliness
• Semiconductor device fabrication
• Hygiene
• Prevention

Plasma and Fusion Research: Regular Articles Volume 6, A Comparative Study of Divergence-Cleaning Techniques for Multi-Dimensional MHD Schemes∗)

Source URL: www.nifs.ac.jp

Glow Discharge Cleaning for LDX Sarah Dagen MIT Plasma Science and Fusion Center

Source URL: www.psfc.mit.edu

Plasma Cleaning of ITER First Mirrors in magnetic field L. Mosera, R. Steinera, R. Reichleb, F. Leipoldb, L. Marota and E. Meyera a Department of Physics, University of Basel, Klingelbergstrasse 82, 4056 Basel, Switzerla

Source URL: psi2014.nifs.ac.jp

Advances in Remote Plasma Sources for Cleaning 300 mm and Flat Panel CVD Systems

Source URL: www.mksinst.com

• Materials science
• Technology
• Plasma etching
• Plasma
• Chemical vapor deposition
• Etching
• Sputtering
• Ion source
• Ultra-high-purity steam for oxidation and annealing
• Semiconductor device fabrication
• Plasma processing
• Chemistry

Application Note ASTRON® Remote Plasma Source for Thin-Film Photovoltaic Process Chamber Cleaning PROBLEM The layers in a thin film photovoltaic (TFPV) device are deposited using deposition techniques, some of which hav

Source URL: www.mksinst.com

• Plasma processing
• Thin film deposition
• Technology
• Coatings
• Vacuum
• Thin film
• Chemical vapor deposition
• Plasma
• Etching
• Semiconductor device fabrication
• Materials science
• Chemistry

Crop processing Innovations Addressing future needs of Australian vegetable industry Dr. Mala Gamage| Research Project Leader 9 May2012 FOOD AND NUTRITIONAL SCIENCES

Source URL: ausveg.com.au

• Astrophysics
• Plasma
• Plasma processing
• Plasma source
• Plasma cleaning
• Plasma physics
• Physics
• Optical materials

1 2 Cleaning silver with atmosphericpressure plasma S i l v e r o r s i l v e r a l l o y s u r f a c e s d i s c o l o r o ver time in air: they become tar nished. The reason why tar nishing

Source URL: www.ist.fraunhofer.de

• Matter
• Chemistry
• Astrophysics
• Plasma
• Atmospheric-pressure plasma
• Silver
• Fraunhofer Society
• Metals conservation
• Plasma medicine
• Plasma physics
• Physics
• Electrical conductors